Method for cross-section sample preparation
AssigneeFibics Incorporated
InventorsMichael William PHANEUF, Ken Guillaume LAGAREC, Andrew John MURRAY
Life of this patent
Estimating the term…
Abstract
A novel method for cross-section sample preparation has a sample oriented normal to an SEM/GFIS or other imaging column via a stage, and is operated upon by an FIB to form the cross-section pre-lamella within the sample, followed by an approximate 90° rotation with no tilt of the stage for cut out by the FIB. Asymmetric trenches are milled to have a three-dimensional depth profile to ensure that the FIB has clear line of sight to a face of the resulting pre-lamella when the sample has been rotated. The three-dimensional depth profile further minimizes overall milling time required for the preparation of the pre-lamella.
Claims20
A method for preparing a pre-lamella sample with a focused ion beam system, comprising:
- milling a first trench into a surface of a material;
- milling a second trench into the surface of the material spaced from the first trench to form the pre-lamella sample, where the space between the first and second trenches defines an approximate width of the pre-lamella sample;
- rotating the material to have a wall of the pre-lamella sample in the second trench faces an FIB column, the second trench having a three dimensional depth profile providing line of sight between the FIB column and bottom and side edges of the pre-lamella sample;
- and
- cutting the bottom and side edges of the pre-lamella sample connected to the material to facilitate mechanical removal of the pre-lamella sample from the material.
Dependencies are inferred from the claim text.