Apparatus for producing polycrystalline silicon and polycrystalline silicon
AssigneeShin-Etsu Chemical Co., Ltd.
InventorsTetsuro Okada, Naruhiro Hoshino, Masahiko Ishida
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Abstract
An apparatus for producing polycrystalline silicon by the Siemens method, includes: a carbon-made core wire holder 14 holding a silicon core wire 13; an electrode portion 10 energizing the core wire holder 14, the electrode portion 10 having a top end 18 in contact with a bottom end of the core wire holder 14; and a first screwing section provided 17a only around a lower part of the core wire holder 14 to be fixed to the electrode portion 10, wherein the core wire holder 14 has a contact surface with the top end 18 of the electrode portion 10, the contact surface being lower in electric resistance than an area of the first screwing section 17a to be fastened.
Claims6
An apparatus for producing polycrystalline silicon by the Siemens method, comprising:
- a carbon-made core wire holder holding a silicon core wire;
- an electrode portion energizing the core wire holder, the electrode portion having a top end in contact with a bottom end of the core wire holder;
- and
- a first screwing section provided only around a lower part of the core wire holder to be fixed to the electrode portion,
- wherein the core wire holder has a contact surface with the top end of the electrode portion, the contact surface being lower in electric resistance than an area of the first screwing section to be fastened.
Dependencies are inferred from the claim text.