US 2020/0259476 A1 · RESONANCE DEVICE

Abstract

A resonator that includes a substrate, an insulating film that is formed on the substrate, and vibration regions each of which is formed on the insulating film and includes lower electrodes that are formed on the insulating film, a piezoelectric film that is formed on the lower electrodes, and an upper electrode that is formed on the piezoelectric film. At least one lower electrode of the lower electrodes that are formed on the insulating film has an electric potential that differs from an electric potential of another lower electrode such that at least one vibration region vibrates in antiphase with another vibration region. Moreover, a package seals a resonator and includes the substrate, the insulating film, and the vibration regions and includes a ground terminal for grounding the substrate.

Claims20

Dependent claims

A resonance device comprising:

a substrate;
an insulating film disposed on the substrate;
a plurality of vibration regions each disposed on the insulating film and including lower electrodes disposed on the insulating film, a piezoelectric film disposed on the lower electrodes, and an upper electrode disposed on the piezoelectric film, with at least one lower electrode of the lower electrodes having an electric potential that differs from an electric potential of another lower electrode such that at least one vibration region is configured to vibrate in antiphase with another vibration region;
and
a package configured to seal a resonator including the substrate, the insulating film, and the plurality of vibration regions, with the package including a ground terminal for grounding the substrate.

2 more elements

Dependencies are inferred from the claim text.

Resonance device

Life of this patent

Resonance device

Life of this patent

Abstract

Claims20