Method for nanomodulating metal films by means of high-vacuum cathode sputtering of metals and stencils
AssigneeUniversidad de Santiago de Chile
InventorsJuan Luis Palma Solorza, Juan Eduardo Escrig Murua, Juliano Casagrande Denardin
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Abstract
The present invention relates to a method for nanomodulating metal films by means of high-vacuum cathode sputtering of metals, and to stencils of anodized Al. As an example of the use of these nanomodulated metal films, the synthesis or production of a magnetically weak film by means of cathode sputtering, which film can he used as a magnetic field sensor, and a metal nanomodulated stencil are analyzed.
Claims15
Method for nanomodulation of metal surfaces, comprising the following steps:
- a) to obtain a template recorded with aluminum nanovalleys, anodizing a high-purity aluminum film consisting of a natural oxide layer very thin of aluminum on its surface, growing said layer by using an electrochemical solution to partially dissolve the oxide aluminum and form a porous layer is supported on the aluminum, which is removed by selective chemical attack with an acidic solution, to thereby obtaining aluminum with semicircular holes arranged hexagonally, and then obtaining an aluminum substrate metal which is recorded with semicircular nanovalleys hexagonally ordered;
- wherein said electrolytic solution is selected from sulfuric acid (H2SO4), oxalic acid (H2C2O4) or phosphoric acid (H3PO4), and said acid solution is a mixture of chromic acid (CrOs), phosphoric acid (H3PO49 and H20;
- b) nanomodulating a metal film using aluminum substrate recorded with nanovalleys obtained in step a), by evaporating onto said substrate a metal selected from the group consisting of Au, Cu or Ag to generate a metal film then take off, and where evaporation of metal is deposited, it is performed by sputtering in a high vacuum, and the metal evaporated adopts the structure of aluminum nanovalleys, and where to ensure low adhesion of metal deposited on the nanostructured aluminum is used a deposition rate very high, between 59 and 127 nm/min and also a distance of approximately 5 cm between the barrel and the substrate is used;
- c) removing the foil substrate by simply removing the foil deposited aluminum substrate nanovalleys.
nanostructured metal films by nanodomes sorted, wherein the solid hemispheres nanodomes are arranged in hexagonal arrays, and the radius of nanodomes is in the range of 25-155 nm, the center to center distance to nanodome-nanodome is in the range of 55-325 nm and the film thickness is 60 nm.
Dependencies are inferred from the claim text.