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US 2020/0238570 A1Published application
Processing apparatus
AssigneeDisco Corporation
InventorsToshiyasu RIKIISHI, Yasushi KATAGIRI
Life of this patent
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Abstract
A processing apparatus includes a chuck table for holding a workpiece, a processing unit for processing the workpiece held on the chuck table as supplying a processing water to the workpiece, and a water pan fixed to a bottom of the processing apparatus for receiving the processing water as a water leaked.
Claims4
A processing apparatus comprising:
- a chuck table for holding a workpiece;
- processing means for processing said workpiece held on said chuck table as supplying a processing water to said workpiece;
- and
- a water pan fixed to a bottom of said processing apparatus for receiving said processing water as a water leaked.
1 more element
Dependencies are inferred from the claim text.