Stage mechanism

Abstract

Provided is a compact stage mechanism entailing little backlash and little play in a direction along the axis of a feed screw. A stage mechanism 10 includes a feed screw 11, a fixed stage 13 having a space portion 13a incorporating the feed screw, a movable stage 15, and a backlash absorbing portion 17. The feed screw has a first end portion 11d and a second end portion 11e. The stage mechanism further includes a deviation preventing portion 19 preventing the feed screw from deviating in a direction toward the first end portion and a pressing force adjusting portion 21 adjusting the pressing force by which the feed screw is pressed in a direction from the second end portion side to the first end portion. The deviation preventing portion is in contact with a wall 13b of the space portion on the first end portion side. The pressing force adjusting portion is in line contact with and presses the second end portion.

Dependencies are inferred from the claim text.