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US 2020/0230819 A1Published application
Transfer apparatus
AssigneeTokyo Electron Limited
InventorsShota Shimazaki, Keisuke Kondoh
Life of this patent
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Abstract
According to one embodiment of the present disclosure, there is provided a transfer apparatus comprising at least one arm configured to support a substrate; at least one gear disposed at a joint that rotatably supports the at least one arm, the at least one gear rotating the at least one arm; and a detector disposed to face the at least one gear and configured to detect a temperature of the at least one gear without contacting the at least one gear.
Claims10
A transfer apparatus comprising:
- at least one arm configured to support a substrate;
- at least one gear disposed at a joint that rotatably supports the at least one arm, the at least one gear rotating the at least one arm;
- and
- a detector disposed to face the at least one gear and configured to detect a temperature of the at least one gear without contacting the at least one gear.
1 more element
Dependencies are inferred from the claim text.