Baw resonator based pressure sensor
AssigneeTexas Instruments Incorporated
InventorsBICHOY BAHR, BAHER S. HAROUN, BENJAMIN STASSEN COOK
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Abstract
A pressure sensor apparatus is disclosed. The pressure sensor apparatus includes a bulk acoustic wave (BAW) die having a die interface side and a pressure contact side, a sensor BAW resonator and a reference BAW resonator disposed on the die interface side of the BAW die, a control circuit die coupled to the die interface side of the BAW die via an attachment layer, and an extended opening on the pressure contact side that extends into a depth of the BAW die and is generally aligned with the sensor BAW resonator, the extended opening being configured to translate an external pressure on the pressure contact side onto the sensor BAW resonator.
Claims20
A pressure sensor apparatus, comprising:
- a bulk acoustic wave (BAW) die having a die interface side and a pressure contact side;
- a sensor BAW resonator and a reference BAW resonator disposed on the die interface side of the BAW die;
- a control circuit die coupled to the die interface side of the BAW die via an attachment layer;
- and
- an extended opening on the pressure contact side that extends into a depth of the BAW die and is generally aligned with the sensor BAW resonator, the extended opening being configured to translate an external pressure on the pressure contact side onto the sensor BAW resonator.
A method of fabricating a pressure sensor, the method comprising:
- providing a bulk acoustic wave (BAW) die having a die interface side and a pressure contact side, the BAW die having a sensor BAW resonator and a reference BAW resonator disposed at different locations on the die interface side of the BAW die;
- coupling a control circuit die to the die interface side of the BAW die via an attachment layer;
- and
- etching an extended opening on the pressure contact side that extends into a depth of the BAW die and is generally aligned with the sensor BAW resonator;
- wherein the extended opening is configured to translate an external pressure applied to the pressure contact side of the BAW die onto the sensor BAW resonator.
A tactile sensing apparatus, comprising:
- a plurality of sensor bulk acoustic wave (BAW) resonators;
- a reference BAW resonator;
- a cap configured to accept an external pressure;
- and
- a plurality of extended openings, each extended opening corresponding to a respective one of the plurality of sensor BAW resonators and configured to translate the external pressure applied to a respective portion of the cap to the respective one of the plurality of sensor BAW resonators.
Dependencies are inferred from the claim text.