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US 2020/0206758 A1Published application
Assembly, system and method for supplying liquid
AssigneeXia Tai Xin Semiconductor (Qing Dao) Ltd.
InventorYOUNG-SIK PARK
Life of this patent
Estimating the term…
Abstract
A liquid supply assembly is provided. The liquid supply assembly includes a receiving portion, a dispersing portion, and two flow controllers. The two flow controllers are connected between the receiving portion and the dispersing portion. A plurality of perforations are formed on the dispersing portion.
Claims16
A liquid supply assembly comprising:
- a receiving portion;
- a dispersing portion;
- and
- two flow controllers connected between the receiving portion and the dispersing portion, wherein a plurality of perforations are formed on the dispersing portion.
1 more element
A wafer processing system comprising:
- a wafer processing container;
- and
- a liquid supply assembly configured to disperse liquid in the wafer processing container, the liquid supply assembly comprising:
- a receiving portion;
- a dispersing portion;
- and
- two flow controllers connected between the receiving portion and the dispersing portion, wherein a plurality of perforations are formed on the dispersing portion.
4 more elements
A method for supplying liquid in a wafer processing container, the method comprising:
- providing a liquid supply assembly, wherein the liquid supply assembly comprises a receiving portion, a dispersing portion, and two flow controllers connected between the receiving portion and the dispersing portion and a plurality of perforations are formed on the dispersing portion;
- and
- performing an operation to the two flow controllers.
Dependencies are inferred from the claim text.