Device and Method for the Controlled Processing of a Workpiece with Processing Radiation

A device for controlled processing of at least one workpiece with processing radiation, the device comprising:

• a workpiece carrier having a revolving rotary shaft and at least one workpiece receptacle for receiving the at least one workpiece, at least one processing unit having a processing beam source which directs a processing beam (E) onto the workpiece received in the at least one workpiece receptacle, at least one inspection unit having an inspection beam source which directs an inspection beam (P) onto the workpiece, and a detector which detects a transmitted, reflected or scattered inspection beam portion (P′) of the inspection beam (P), and at least one linear motor by which the at least one processing unit and the at least one inspection unit can be moved relative to the workpiece carrier, wherein the workpiece is scanned by the processing beam (E) and the inspection beam (P) following the processing beam (E), along scanning lines extending side by side, and the workpiece is processed and inspected along the scanning lines;
• the revolving rotary shaft is connected to a motor to generate rotary motion of the workpiece carrier in a direction of rotation (Rrot);
• the at least one processing unit and the at least one inspection unit being offset by an angular distance (βn) relative to one another and each being arranged to be radially adjustable relative to the rotary shaft and being connected to the at least one linear motor to generate translational movements of the processing unit and of the inspection unit relative to the workpiece carrier in two radial translational directions (Rtrans 1, Rtrans 2) forming the angular distance (βn) with one another;
• whereby the processing beam (E) and the inspection beam (P) are offset from one another by the angular distance (βn) and follow the same spiral movement path (S) with a plurality of turnings (W) relative to the workpiece carrier;
• the at least one workpiece receptacle being arranged at a distance (a) from the rotary shaft so that the at least one workpiece receptacle or the at least one workpiece positioned therein is covered by partial sections (S′) of the turnings (W) which each represent one of the scanning lines;
• and
• a control and computing unit being connected to the at least one inspection unit, to the at least one processing unit, to the motor and to the at least one linear motor to change at least one process parameter of the device as a function of inspection results derived from the inspection beam portion (P)′.