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US 2020/0199753 A1Published application
Fluid control device
AssigneeFujikin Incorporated
InventorsAtsushi HIDAKA, Takatoshi NAKATANI, Keisuke NAKATSUJI, Keiji HIRAO, Yukio MINAMI, Nobukazu IKEDA
Life of this patent
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Abstract
In order to appropriately control temperatures of fluid heating sections that are maintained at different temperatures, the fluid control device (100) comprises a plurality of fluid heating sections (1) connected to each other and each having a flow path or a fluid accommodating portion inside, heaters (10) configured to heat each of the plurality of fluid heating sections to different temperatures, and heat insulating members (13, 13′) disposed between adjacent fluid heating sections.
Claims7
A fluid control device comprising:
- a plurality of fluid heating sections connected to each other and each provided with a flow path or a fluid accommodation portion inside;
- heaters each configured to heat each of the plurality of fluid heating sections to different temperatures;
- and
- a heat insulating member disposed between adjacent fluid heating sections.
1 more element
Dependencies are inferred from the claim text.