Gettering layer forming apparatus, gettering layer forming method and computer-readable recording medium
AssigneeTokyo Electron Limited
InventorTetsuo FUKUOKA
Life of this patent
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Abstract
A gettering layer forming apparatus configured to form a gettering layer on a substrate includes a substrate holder configured to hold the substrate; a wrapping film configured to be brought into contact with the substrate held by the substrate holder and polish the substrate; a base configured to support the wrapping film, and configured to be moved in a vertical direction and rotated around a vertical axis; and a water supply configured to supply water onto the substrate held by the substrate holder.
Claims18
A gettering layer forming apparatus configured to form a gettering layer on a substrate, the gettering layer forming apparatus comprising:
- a substrate holder configured to hold the substrate;
- a wrapping film configured to be brought into contact with the substrate held by the substrate holder and polish the substrate;
- a base configured to support the wrapping film, and configured to be moved in a vertical direction and rotated around a vertical axis;
- and
- a water supply configured to supply water onto the substrate held by the substrate holder.
A gettering layer forming method of forming a gettering layer on a substrate by using a gettering layer forming apparatus,
- wherein the gettering layer forming apparatus comprises:
- a substrate holder configured to hold the substrate;
- a wrapping film configured to polish the substrate;
- a base configured to support the wrapping film, and configured to be moved in a vertical direction and rotated around a vertical axis;
- and
- a water supply configured to supply water to the substrate, and
- wherein the gettering layer forming method comprises:
- holding the substrate by the substrate holder and bringing the wrapping film into contact with the substrate;
- and
- rotating the base to thereby polish the substrate with the wrapping film while supplying the water to the substrate from the water supply.
A computer-readable recording medium having stored thereon computer-executable instructions that, in response to execution, cause a gettering layer forming apparatus to perform a gettering layer forming method of forming a gettering layer on a substrate,
- wherein the gettering layer forming apparatus comprises:
- a substrate holder configured to hold the substrate;
- a wrapping film configured to polish the substrate;
- a base configured to support the wrapping film, and configured to be moved in a vertical direction and rotated around a vertical axis;
- and
- a water supply configured to supply water to the substrate, and
- wherein the gettering layer forming method comprises:
- holding the substrate by the substrate holder and bringing the wrapping film into contact with the substrate;
- and
- rotating the base to thereby polish the substrate with the wrapping film while supplying the water to the substrate from the water supply.
Dependencies are inferred from the claim text.