Piezoelectric device and method of manufacturing the same
AssigneeMurata Manufacturing Co., Ltd.
InventorsShinsuke IKEUCHI, Tetsuya KIMURA, Katsumi FUJIMOTO, Yutaka KISHIMOTO, Fumiya KUROKAWA
Life of this patent
Estimating the term…
Abstract
A piezoelectric device includes a piezoelectric single crystal body with a homogeneous polarization state and of which at least a portion flexurally vibrates, an upper electrode on an upper surface of the piezoelectric single crystal body, a lower electrode on a lower surface of the piezoelectric single crystal body, and a supporting substrate below the piezoelectric single crystal body. A recess extends from a lower surface of the supporting substrate toward the lower surface of the piezoelectric single crystal body.
Claims23
A piezoelectric device comprising:
- a piezoelectric single crystal body that has a homogeneous polarization state and of which at least a portion is configured to flexurally vibrate;
- an upper electrode disposed on an upper surface of the piezoelectric single crystal body;
- a lower electrode disposed on a lower surface of the piezoelectric single crystal body;
- and
- a supporting substrate disposed below the piezoelectric single crystal body;
- wherein
- a recess extends from a lower surface of the supporting substrate toward the lower surface of the piezoelectric single crystal body.
A method of manufacturing a piezoelectric device of which at least a portion of the piezoelectric single crystal body is configured to flexurally vibrate, the method comprising:
- preparing a piezoelectric single crystal body having a homogeneous polarization state;
- forming a lower electrode on a lower surface of the piezoelectric single crystal body;
- forming an upper electrode on an upper surface of the piezoelectric single crystal body;
- disposing a supporting substrate below the piezoelectric single crystal body;
- and
- forming a recess that extends from a lower surface of the supporting substrate toward the lower surface of the piezoelectric single crystal body.
Dependencies are inferred from the claim text.