Suspended-membrane thermal detector comprising a deformable absorber
AssigneeCommissariat A L'energie Atomique Et Aux Energies Alternatives
InventorsAbdelkader ALIANE, Jean-Louis OUVRIER-BUFFET
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Abstract
A thermal detector including a three-dimensional structure adapted for detecting electromagnetic radiation, suspended above and thermally insulated from a substrate, including a membrane and an absorber, the latter being formed on the basis of a shape-memory alloy and being adapted to have a flat detection configuration when its temperature is less than or equal to T1 and a cooling curve configuration when its temperature is above an austenite start temperature As.
Claims12
1-11. (canceled)
A thermal detector adapted for detecting electromagnetic radiation, comprising:
- a substrate;
- a reflector of said electromagnetic radiation;
- a three-dimensional structure configured to detect said electromagnetic radiation, suspended above the substrate and thermally insulated from the substrate, comprising:
- a membrane comprising a thermometric transducer,
- an absorber of said electromagnetic radiation,
- resting on the membrane and partly spaced from the latter, and connected thermally to the thermometric transducer,
- spaced with respect to the reflector so as to form a quarter-wave interference cavity for electromagnetic radiation,
- wherein the absorber is:
- formed on the basis of a shape-memory alloy having an inverse martensitic transformation of a martensitic phase into an austenitic phase of said alloy starting from an austenite start temperature As, and
- configured to have:
- a detection configuration when its temperature is less than or equal to a first threshold temperature T1, in which it extends in a flat manner in a plane parallel to the reflector, and
- a cooling configuration when its temperature is above a predetermined second threshold temperature T2 equal to the austenite start temperature As, in which it extends at least partly in a curved manner with respect to a plane parallel to the reflector.
Dependencies are inferred from the claim text.