Manufacturing process monitoring apparatus

A manufacturing process monitoring apparatus comprising:

• a feature value storage unit configured to store information on feature values grasping an operational condition of a manufacturing facility for each of a plurality of categories classified in advance;
• a data conversion unit configured to convert process data including operational data of the manufacturing facility or measured data by measurement devices provided in the manufacturing facility;
• a feature value analysis unit configured to analyze the data converted by the data conversion unit based on the information on the feature values stored in the feature value storage unit;
• a data restoration unit configured to restore data for each of the plurality of categories based on the information on the feature values stored in the feature value storage unit and information on the result analyzed by the feature value analysis unit;
• a similarity calculation unit configured to calculate a similarity for each of the plurality of categories based on the data used when being analyzed by the feature value analysis unit and the data restored by the data restoration unit;
• a category determination unit configured to determine a category of the data based on the similarity for each of the plurality of categories calculated by the similarity calculation unit;
• a category classification unit configured to classify the category to which the process data belongs;
• and
• a process state diagnostic unit configured to diagnose a state of the manufacturing process based on result of comparison between the category determined by the category determination unit and the category classified by the category classification unit.