System and Method for Pumping Laser Sustained Plasma with an Illumination Source Having Modified Pupil Power Distribution
AssigneeKLA-Tencor Corporation
InventorsIlya Bezel, Matthew Derstine, Andrey Stepanov, Nikolay Sherbak
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Abstract
A system for generating pump illumination for laser sustained plasma (LSP) is disclosed. In embodiments, the system includes an illumination source and a beam shaper. The illumination source can be configured to output illumination having a first pupil power distribution. In embodiments, the beam shaper is configured to receive the illumination having the first pupil power distribution from the illumination source and is further configured to output pump illumination having a second pupil power distribution that is different from the first pupil power distribution.
Claims37
A system for generating pump illumination for a laser sustained plasma, comprising:
- an illumination source configured to output illumination having a first pupil power distribution;
- and
- a beam shaper configured to receive the illumination having the first pupil power distribution from the illumination source and configured to output pump illumination having a second pupil power distribution that is different from the first pupil power distribution.
A system for generating broadband illumination, comprising:
- a plasma forming material;
- one or more pump modules, each pump module including:
- an illumination source configured to output illumination having a first pupil power distribution;
- and
- a beam shaper configured to receive the illumination having the first pupil power distribution from the illumination source and configured to output pump illumination having a second pupil power distribution that is different from the first pupil power distribution;
- and
- one or more optical elements configured to direct the pump illumination to the plasma forming material, whereby the pump illumination causes the plasma forming material to form a plasma that emits broadband illumination.
A method of generating broadband illumination, comprising:
- generating illumination having a first pupil power distribution with an illumination source;
- reshaping the illumination having the first pupil power distribution into to pump illumination having a second pupil power distribution that is different from the first pupil power distribution;
- and
- directing the pump illumination to a plasma forming material, whereby the pump illumination causes the plasma forming material to form a plasma that emits broadband illumination.
Dependencies are inferred from the claim text.