Workpiece Holding Jig and Electroplating Apparatus

A workpiece holding jig for holding a workpiece having a plate shape, the workpiece being an object to be electroplated, the workpiece holding jig comprising:

• a back panel;
• and
• a frame body, wherein
• the workpiece is held between the back panel and the frame body,
• the frame body is configured to be attached to the back panel to hold a peripheral portion of the workpiece between the frame body and the back panel,
• the frame body includes a main body having an annular shape, a conductive member provided all over the main body, a contact member provided along the conductive member, the contact member being electrically connected to the conductive member to come into electrical contact with the peripheral portion of the workpiece, and a seal member provided all over the main body and located on an inner side of the main body relative to the contact member,
• the frame body is adapted to form a sealed space that accommodates the peripheral portion of the workpiece, the conductive member, and the contact member in a state where the seal member and the contact member are in contact with the peripheral portion of the workpiece, and
• the conductive member has a wide and thick form to exhibit an approximately uniform resistance value at any point all over the conductive member.