Laser processing device
AssigneeHamamatsu Photonics K.K.
InventorJunji OKUMA
Life of this patent
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Abstract
A laser processing device includes a support unit, a laser light source, a reflecting spatial light modulator, a light collection optical system, an imaging optical system, a minor, a first sensor configured to acquire displacement data on a laser light entry surface, and a second sensor configured to acquire displacement data on the laser light entry surface. An optical path of the laser light extending from the mirror to the light collection optical system is set along a first direction. An optical path of the laser light extending from the reflecting spatial light modulator to the mirror through the imaging optical system is set along a second direction. The first sensor is disposed on one side of the light collection optical system in a third direction.
Claims9
A laser processing device comprising:
- a support unit configured to support an object to be processed;
- a laser light source configured to emit laser light;
- a reflecting spatial light modulator configured to modulate and reflect the laser light;
- a light collection optical system configured to converge the laser light at the object;
- an imaging optical system constituting a both-side telecentric optical system in which a reflecting surface of the reflecting spatial light modulator and an entrance pupil surface of the light collection optical system have an imaging relation;
- a mirror configured to reflect, toward the light collection optical system, the laser light passing through the imaging optical system;
- a first sensor configured to irradiate the object with first ranging laser light different in axis from the laser light without through the light collection optical system and receive reflected light of the first ranging laser light to acquire displacement data on a laser light entry surface of the object;
- and
- a second sensor configured to irradiate the object with second ranging laser light coaxial with the laser light through the light collection optical system and receive reflected light of the second ranging laser light to acquire displacement data on the laser light entry surface, wherein
- an optical path of the laser light extending from the mirror to the light collection optical system is set along a first direction,
- an optical path of the laser light extending from the reflecting spatial light modulator to the mirror through the imaging optical system is set along a second direction orthogonal to the first direction, and
- the first sensor is disposed on one side of the light collection optical system in a third direction orthogonal to the first direction and the second direction.
A laser processing device comprising:
- a laser light source configured to emit laser light;
- a spatial light modulator configured to modulate the laser light;
- a light collection optical system configured to converge the laser light at an object to be processed;
- a first sensor configured to irradiate the object with first ranging laser light different in axis from the laser light without through the light collection optical system and receive reflected light of the first ranging laser light to acquire displacement data on a laser light entry surface of the object;
- and
- a second sensor configured to irradiate the object with second ranging laser light coaxial with the laser light through the light collection optical system and receive reflected light of the second ranging laser light to acquire displacement data on the laser light entry surface.
Dependencies are inferred from the claim text.