X-ray device, x-ray inspection method, and data processing apparatus

An X-ray inspection method which inspects an object, wherein beam-shaped X-rays are radiated to the object and the object is inspected based on amounts of the X-rays transmitted through the object, wherein the method comprising:

• generating the X-rays;
• acquiring a detection signal corresponding to an amount of the X-rays which have been transmitted through the object in each of previously set n-number energy bins of the X-rays (n is a positive integer of two or more);
• acquiring, based on the detection signals, information showing a thickness t of the object and an average linear attenuation coefficient μ in a transmission direction of fluxes of the X-rays, in each of the energy bins;
• and
• calculating pixel data composed of pixel values each obtained by multiplying addition information by the thickness t, based on the acquired information, the addition information being obtained by mutual addition of the average linear attenuation coefficients μ in the respective energy bins.

A data processing apparatus for inspecting an object based on amounts of X-rays transmitted through the object, the apparatus comprising:

• X-ray detecting means that detects amounts of the X-rays transmitted through the object in each of n-number X-ray energy bins (n is a positive integer of 2 or more) which are set in advance to the X-rays, and outputs detection signals corresponding to the transmitted amounts;
• information acquiring means that acquires, based on the detection signals detected by X-ray detecting means, information showing a thickness t of the object and an average linear attenuation coefficient μ in a transmission direction of fluxes of the X-rays, in each of the energy bins;
• and
• pixel data calculating means that calculates pixel data composed of pixel values each obtained by multiplying addition information by the thickness t, based on the information acquired by the information acquiring means, the addition information being obtained by mutual addition of the average linear attenuation coefficients μ in the respective energy bins.

A data processing method of inspecting an object based on amounts of X-rays transmitted through the object, the method comprising:

• acquiring detection signals corresponding to amounts of the X-rays transmitted through the object in each of n-number X-ray energy bins (n is a positive integer of 2 or more) which are set in advance to the X-rays;
• acquiring, based on the detection signals, information showing a thickness t of the object and an average linear attenuation coefficient μ in a transmission direction of fluxes of the X-rays, in each of the energy bins;
• and
• calculating pixel data composed of pixel values each obtained by multiplying addition information by the thickness t, based on the acquired information, the addition information being obtained by mutual addition of the average linear attenuation coefficients μ in the respective energy bins.

A computer program readably stored in a computer readable non-transient recording medium in advance, the program enabling a computer to read the program and execute steps of the read program for inspecting an object based on amounts of X-rays transmitted through the object, the program enabling the computer to

• acquire detection signals corresponding to amounts of the X-rays transmitted through the object in each of n-number X-ray energy bins (n is a positive integer of 2 or more) which are set in advance to the X-rays;
• acquire, based on the detection signals, information showing a thickness t of the object and an average linear attenuation coefficient μ in a transmission direction of fluxes of the X-rays, in each of the energy bins;
• and
• calculate pixel data composed of pixel values each obtained by multiplying addition information by the thickness t, based on the acquired information, the addition information being obtained by mutual addition of the average linear attenuation coefficients μ in the respective energy bins.