Layered body and saw device
AssigneeSumitomo Electric Industries, Ltd.
InventorsKeiichirou GESHI, Ryota YAMAGUCHI, Masato HASEGAWA
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Abstract
A layered body includes a ceramic substrate formed of a polycrystalline ceramic and having a supporting main surface and a piezoelectric substrate formed of a piezoelectric material and having a bonding main surface that bonds to the supporting main surface through Van der Waals force. The ceramic substrate includes a supporting main surface amorphous layer formed so as to include the supporting main surface. The piezoelectric substrate includes a bonding main surface amorphous layer formed so as to include the bonding main surface. The supporting main surface amorphous layer has a smaller thickness than the bonding main surface amorphous layer.
Claims6
A layered body comprising:
- a ceramic substrate formed of a polycrystalline ceramic and having a supporting main surface;
- and
- a piezoelectric substrate formed of a piezoelectric material and having a bonding main surface that bonds to the supporting main surface through Van der Waals force,
- wherein the ceramic substrate includes a supporting main surface amorphous layer formed so as to include the supporting main surface,
- the piezoelectric substrate includes a bonding main surface amorphous layer formed so as to include the bonding main surface, and
- the supporting main surface amorphous layer has a smaller thickness than the bonding main surface amorphous layer.
Dependencies are inferred from the claim text.