Elastic wave device
AssigneeMurata Manufacturing Co., Ltd.
InventorTakayuki OKUDE
Life of this patent
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Abstract
A longitudinally coupled resonator elastic wave filter is disposed on a piezoelectric substrate. IDT electrodes include first and second busbars. An inorganic insulating layer is provided on at least one side in a direction perpendicular or substantially perpendicular to an elastic wave propagation direction to cover the first or second busbars, and a first wiring line is disposed on the inorganic insulating layer to extend in the elastic wave propagation direction. A second wiring line three-dimensionally crosses the first wiring line with the inorganic insulating layer interposed therebetween. The first wiring line is connected to busbars, which are connected to the same potential, by extending through the inorganic insulating layer.
Claims12
An elastic wave device comprising:
- a piezoelectric substrate;
- and
- a first longitudinally coupled resonator elastic wave filter that is disposed on the piezoelectric substrate and that includes at least three interdigital transducer (IDT) electrodes arranged in an elastic wave propagation direction;
- wherein
- each of the IDT electrodes includes a first busbar and a second busbar, the first busbar and the second busbar being respectively disposed on a first end side and a second end side in a direction perpendicular or substantially perpendicular to the elastic wave propagation direction;
- an insulating layer covers a plurality of the first busbars or a plurality of the second busbars on at least one of the first end side and the second end side;
- the elastic wave device further includes:
- a first wiring line that is located above the plurality of first busbars or above the plurality of second busbars and disposed on the insulating layer so as to extend in the elastic wave propagation direction;
- and
- a second wiring line that is disposed on the piezoelectric substrate so as to three-dimensionally cross the first wiring line with the insulating layer interposed between the first wiring line and the second wiring line;
- the first wiring line is connected to the busbars among the plurality of first busbars or among the plurality of second busbars, the busbars being connected to a same potential, by extending through the insulating layer;
- and
- the first wiring line is a wiring line connected to a ground potential and surrounds the first longitudinally coupled resonator elastic wave filter and the elastic wave element.
Dependencies are inferred from the claim text.