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US 2020/0091498 A1Published application
Direct printing of 3-d microbatteries and electrodes
AssigneeUniversity of Massachusetts
InventorsJames J. Watkins, Wenhao Li
Life of this patent
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Abstract
Various embodiments disclosed relate to novel methods of fabricating 3-D Li ion batteries using direct nanoimprint lithography. The present invention includes methods of fabricating high surface area electrodes, including imprint patterning of high aspect ratio parallel grating style electrodes. The method includes coating a substrate with an ink containing nanoparticles and subsequently annealing the ink into a desired pattern.
Claims20
A method of fabricating an electrode, comprising:
- depositing an ink comprising electroactive nanoparticles, and optionally at least one conductive additive, on a substrate comprising an electrical contact to form a film;
- stamping the film with a mold to form a patterned film;
- and
- annealing the patterned film to form an electrode.
1 more element
A method of fabricating electrodes, comprising:
- spin-coating an ink comprising about 3 wt % TiO2 nanoparticles, comprising number-averaged and volume-averaged particle sizes of about 1 nm to about 25 nm, dispersed in an alcohol solvent on a gold contact formed on a silicon dioxide substrate to form a film;
- stamping the film with a mold to form a film having a parallel grating pattern, wherein the grating pattern has a spacing of about 1 μm, and each grating has a height of about 0.01 μm to about 0.25 μm and a width of about 0.01 μm to about 0.25 μm;
- annealing the patterned film to form an electrode layer;
- planarizing the electrode by depositing at least one layer of a crosslinkable pre-polymer photoresist on the electrode layer, followed by curing the photoresist to form a planarized layer;
- and
- forming at least five additional electrodes by additional cycles of the spin-coating, the stamping, the annealing, the planarizing, and the curing;
- wherein in each successive cycle the parallel grating pattern is formed perpendicular to and overlapping the previously deposited grating pattern.
4 more elements
A method of fabricating electrodes, comprising:
- depositing a first ink comprising electroactive nanoparticles, and optionally at least one conductive additive, on a substrate to form a film;
- stamping the film with a mold to form a stamped structure;
- annealing the stamped structure to form a first electrode;
- depositing on the first electrode at least one layer of a separator;
- and
- backfilling the stamped structure with a second ink comprising electroactive nanoparticles to form a second electrode.
3 more elements
Dependencies are inferred from the claim text.