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AssigneeWuhan China Star Optoelectronics Semiconductor Display Technology Co., Ltd.
InventorJing HUANG
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A method of manufacture OLED thin-film encapsulation layer, an OLED thin-film encapsulation structure and an OLED structure are provided. The method of manufacture OLED thin-film encapsulation layer comprises following steps. Depositing a first inorganic material layer on a substrate positioning an OLED element, the first inorganic material layer is totally covered the OLED element; Depositing a first organic material layer on the first inorganic material layer by PECVD process; Depositing a second organic material layer on the first organic material layer by IJP process; Depositing a second inorganic material layer on the second organic material layer. The advantageous of this disclosure could decreases thickness of the OLED thin-film encapsulation layer.
A method of manufacture OLED thin-film encapsulation layer, comprising
An OLED thin-film encapsulation device, comprising:
An OLED device comprising a substrate and an OLED element formed on the substrate, wherein, an OLED thin-film encapsulation structure is formed on the OLED element, the OLED thin-film encapsulation structure comprising:
Dependencies are inferred from the claim text.