Forming dielectric for electronic devices
AssigneeFlexenable Limited
InventorsJan Jongman, Romain Futsch
Life of this patent
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Abstract
A method of forming a stack of layers defining one or more electronic devices, the method comprising: depositing a first thickness of curable, dielectric or dielectric precursor material over an area of a workpiece; thereafter exposing the workpiece to curing conditions at least over said area of said workpiece; and without any intermediate patterning operation, thereafter depositing a second thickness of said curable material over said area of said workpiece; and thereafter again exposing the workpiece to curing conditions at least over said area of said workpiece.
Claims13
A method of forming a stack of layers defining one or more electronic devices, the method comprising:
- depositing a first thickness of curable, dielectric or dielectric precursor material over an area of a workpiece;
- thereafter exposing the workpiece to curing conditions at least over said area of said workpiece;
- and without any intermediate patterning operation, thereafter depositing a second thickness of said curable material over said area of said workpiece;
- and thereafter again exposing the workpiece to curing conditions at least over said area of said workpiece.
A method of forming a stack of layers defining one or more electronic devices, the method comprising:
- depositing a controlled amount of a solution of dielectric material or dielectric precursor material on a workpiece over an area of the workpiece, and thereafter depositing a second controlled amount of said solution of a dielectric material or a dielectric precursor material on the workpiece over said area of the workpiece;
- wherein prior to depositing said second controlled amount of said solution of dielectric material or dielectric precursor material, subjecting the workpiece to a surface treatment so as to increase the wettability of the surface of the workpiece for said solution of gate dielectric material or gate dielectric precursor material over said area of the workpiece.
Dependencies are inferred from the claim text.