Thin-film Piezoelectric-material Element, Method of Manufacturing the Same, Head Gimbal Assembly and Hard Disk Drive
AssigneeSAE Magnetics (H.K.) Ltd.
InventorsWei Xiong, Atsushi Iijima
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Abstract
A thin-film piezoelectric-material element includes a laminated structure part having a lower electrode film, a piezoelectric-material film laminated on the lower electrode film and an upper electrode film laminated on the piezoelectric-material film. The piezoelectric-material film includes a size larger than the upper electrode film, a riser end-surface and step-surface formed on a top-surface of the upper electrode film side. The riser end-surface connects smoothly with a peripheral end-surface of the upper electrode film and vertically intersects with the top-surface. The step-surface intersects vertically with the riser end-surface.
Claims15
A thin-film piezoelectric-material element comprising:
- a laminated structure part comprising a lower electrode film, a piezoelectric-material film laminated on the lower electrode film and an upper electrode film laminated on the piezoelectric-material film;
- wherein the piezoelectric-material film comprising:
- a film-size larger than the upper electrode film;
- and
- a riser end-surface and a step-surface, formed on a top-surface of the upper electrode film side,
- wherein the riser end-surface connects smoothly with a peripheral end-surface of the upper electrode film and vertically intersects with the top-surface,
- wherein the step-surface intersects vertically with the riser end-surface.
A method of manufacturing a thin-film piezoelectric-material element comprising:
- a laminated structure part forming step of forming a laminated structure part comprising a lower electrode film, a piezoelectric-material film laminated on the lower electrode film and an upper electrode film laminated on the piezoelectric-material film;
- wherein the laminated structure part forming step comprising:
- an upper electrode forming step of forming the upper electrode film, on the piezoelectric-material film, having a size smaller than the piezoelectric-material film;
- and
- an edge processing step to remove an outside-part, of a top-surface of the upper electrode film side outside than the upper electrode film to form a rise end-surface which connects smoothly with a peripheral end-surface of the upper electrode film and vertically intersects with the top-surface, and a step-surface intersects vertically with the riser end-surface.
A head gimbal assembly comprising a head slider having a thin-film magnetic head;
- a suspension for supporting the head slider;
- and a thin-film piezoelectric-material element for displacing the head slider relatively to the suspension;
- wherein the thin-film piezoelectric-material element comprising:
- a laminated structure part comprising a lower electrode film, a piezoelectric-material film laminated on the lower electrode film and an upper electrode film laminated on the piezoelectric-material film;
- wherein the piezoelectric-material film comprising:
- a size larger than the upper electrode film;
- and
- a riser end-surface and step-surface, formed on a top-surface of the upper electrode film side,
- wherein the riser end-surface connects smoothly with a peripheral end-surface of the upper electrode film and vertically intersects with the top-surface,
- wherein the step-surface intersects vertically with the riser end-surface.
A hard disk drive comprising a head gimbal assembly including a head slider having a thin-film magnetic head, a suspension for supporting the head slider, a thin-film piezoelectric-material element for displacing the head slider relatively to the suspension;
- and a recording medium;
- wherein the thin-film piezoelectric-material element comprising:
- a laminated structure part comprising a lower electrode film, a piezoelectric-material film laminated on the lower electrode film and an upper electrode film laminated on the piezoelectric-material film;
- wherein the piezoelectric-material film comprising:
- a size larger than the upper electrode film;
- and
- a riser end-surface and step-surface, formed on a top-surface of the upper electrode film side,
- wherein the riser end-surface connects smoothly with a peripheral end-surface of the upper electrode film and vertically intersects with the top-surface,
- wherein the step-surface intersects vertically with the riser end-surface.
Dependencies are inferred from the claim text.