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US 2020/0091388 A1Published application
Highly efficient microdevices
AssigneeVueReal Inc.
InventorsGholamreza Chaji, Ehsanollah Fathi, Yunhan Li, Hossein Zamani Siboni
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Abstract
Methods and structures are disclosed for highly efficient vertical devices. The vertical device comprising a plurality of planar active layers formed on a substrate, at least one of a top layer of the plurality of the layers is formed as a plurality of nano-pillars and a passivation layer formed on a space between the plurality of the nanopillars.
Claims22
A vertical device comprising:
- a plurality of planar active layers formed on a substrate, at least one of a top layer of the plurality of the layers is formed as a plurality of nano-pillars;
- and
- a first passivation layer formed on a space between the plurality of the nano-pillars and at least a part of sidewalls of the plurality of nano-pillars.
A vertical device comprising:
- a plurality of planar active layers formed on a donor substrate;
- a thin doped layer formed on one of:
- a top or a bottom surface of the plurality of active layers;
- a passivation layer formed to cover at least a part of the thin doped layer;
- and
- a conductive layer coupled to the planar active layers through the areas not covered by the passivation layer.
3 more elements
A method of fabricating a vertical device comprising:
- providing a plurality of planar active layers on a substrate,
- forming a plurality of nano-pillars on at least one of a top layer of the plurality of the active layers;
- and
- forming a first passivation layer on a space between the plurality of the nano-pillars and at least a part of sidewalls of the plurality of nano-pillars.
1 more element
Dependencies are inferred from the claim text.