Optoelectronic Device
AssigneeSilanna UV Technologies Pte Ltd
InventorPetar Atanackovic
Life of this patent
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Abstract
An optoelectronic device comprising a semiconductor structure includes a p-type active region, an n-type active region, and an i-type active region. The semiconductor structure is comprised solely of one or more superlattices, where each superlattice is comprised of a plurality of unit cells. Each unit cell can comprise a layer of GaN and a layer of AlN. In some cases, a combined thickness of the layers comprising the unit cells in the i-type active region is thicker than a combined thickness of the unit cells in the n-type active region, and is thicker than a combined thickness of the unit cells in the p-type active region. The layers in the unit cells in each of the three regions can all have thicknesses that are less than or equal to a critical layer thickness required to maintain elastic strain.
Claims32
A semiconductor structure, comprising:
- a p-type active region comprising a p-type superlattice;
- an n-type active region comprising an n-type superlattice;
- and
- an i-type active region between the n-type active region and the p-type active region comprising an i-type superlattice;
- wherein:
- the semiconductor structure comprises epitaxially grown semiconductor layers comprised solely of superlattices grown along a growth direction;
- the p-type superlattice is comprised of a plurality of p-type unit cells;
- the n-type superlattice is comprised of a plurality of n-type unit cells;
- the i-type superlattice is comprised of a plurality of i-type unit cells;
- an average alloy content of the plurality of p-type, n-type and i-type unit cells is constant along the growth direction;
- the p-type unit cells comprise a first layer of GaN and a first layer of AlN;
- the n-type unit cells comprise a second layer of GaN and a second layer of AlN;
- the i-type unit cells comprise a third layer of GaN and a third layer of AlN;
- a combined thickness of the third layer of GaN and the third layer of AlN is thicker than a combined thickness of the first layer of GaN and the first layer of AlN;
- the combined thickness of the third layer of GaN and the third layer of AlN is thicker than a combined thickness of the second layer of GaN and the second layer of AlN;
- and
- the first, second and third layers of GaN and the first, second and third layers of AlN have thicknesses that are less than or equal to a critical layer thickness required to maintain elastic strain.
Dependencies are inferred from the claim text.