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US 2020/0091358 A1Published application
Touch sensor, method of manufacturing the same and image display device including the same
AssigneeDongwoo Fine-Chem Co., Ltd.
InventorsSung Jin NOH, Do Hyoung KWON, Jong Hee KIM, Sang Jin PARK, Han Tae RYU, Jun Gu LEE
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Abstract
A touch sensor includes a substrate, and an electrode formed from a conductive stack structure including a first conductive oxide layer, a copper-containing metal layer and a second conductive oxide layer sequentially stacked from the substrate. The first conductive oxide layer and the second conductive oxide layer each include a copper-metal oxide. Chemical and mechanical stability of an electrode may be improved by the first and second conductive oxide layers.
Claims18
A touch sensor, comprising:
- a substrate;
- and
- an electrode formed of a conductive stack structure including a first conductive oxide layer, a copper-containing metal layer and a second conductive oxide layer sequentially stacked from the substrate, wherein the first conductive oxide layer and the second conductive oxide layer each includes a copper-metal oxide.
A method of manufacturing a touch sensor, comprising:
- depositing copper and a metal different from the copper on a substrate together with an oxygen injection to form a first conductive oxide layer;
- ceasing the oxygen injection while maintaining the deposition to form a copper-containing metal layer on the first conductive oxide layer;
- performing the oxygen injection again while maintaining the deposition to form a second conductive oxide layer on the copper-containing metal layer such that a conductive stack structure is formed;
- and
- etching the conductive stack structure to form an electrode.
2 more elements
Dependencies are inferred from the claim text.