Integrated Circuits with Capacitors
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHsiao-Han Liu, Hoppy Lee, Chung-Yu Chiang, Po-Nien Chen, Chih-Yung Lin
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AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsHsiao-Han Liu, Hoppy Lee, Chung-Yu Chiang, Po-Nien Chen, Chih-Yung Lin
Estimating the term…
Examples of an integrated circuit with a capacitor structure and a method for forming the integrated circuit are provided herein. In some examples, an integrated circuit device includes a substrate and a trench isolation material disposed on the substrate. An isolation structure is disposed on the trench isolation material. A first electrode disposed on the isolation structure, and a second electrode disposed on the isolation structure. A capacitor dielectric is disposed on the isolation structure between the first electrode and the second electrode. In some such examples, the isolation structure includes a first hard mask disposed on the trench isolation material, a dielectric disposed on the first hard mask, and a second hard mask disposed on the dielectric.
An integrated circuit device comprising:
A device comprising:
A method comprising:
Dependencies are inferred from the claim text.