Active matrix substrate and imaging panel with same
AssigneeSharp Kabushiki Kaisha
InventorsMAKOTO NAKAZAWA, FUMIKI NAKANO, RIKIYA TAKITA
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AssigneeSharp Kabushiki Kaisha
InventorsMAKOTO NAKAZAWA, FUMIKI NAKANO, RIKIYA TAKITA
Estimating the term…
An active matrix substrate includes a photoelectric conversion element 12, a first inorganic insulating film 106, a first planarizing film 107, and a second inorganic insulating film 108a and/or 109 on a substrate 101. The first inorganic insulating film 106, the first planarizing film 107, and the second inorganic insulating film 108a and/or 109 are provided up to an end P2 of the substrate. The first inorganic insulating film 106 covers a surface of the photoelectric conversion element 12, the first planarizing film 107 has a tapered portion, and an angle θ between the tapered portion and the first inorganic insulating film 106 is an acute angle. The second inorganic insulating film 108a and/or 109 covers the first planarizing film 107.
An active matrix substrate comprising:
Dependencies are inferred from the claim text.