Active matrix substrate and imaging panel with same
AssigneeSharp Kabushiki Kaisha
InventorsMAKOTO NAKAZAWA, FUMIKI NAKANO, RIKIYA TAKITA
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Abstract
An active matrix substrate includes a photoelectric conversion element 12, a first planarizing film 107, a first inorganic insulating film 108a, and a bias wire 16. The first planarizing film 107 covers the photoelectric conversion element 12 and has a first opening 107h at a position at which the first opening 107h overlaps with the photoelectric conversion element 12 in plan view. The first inorganic insulating film 108a has a second opening on an inner side of the first opening h and covers a surface of the first planarizing film 107. The bias wire 16 is provided on a first inorganic insulating film 108a and is connected to the photoelectric conversion element 12 via the second opening CH2.
Claims7
An active matrix substrate comprising:
- a substrate;
- a photoelectric conversion element provided on the substrate;
- a first planarizing film that covers the photoelectric conversion element and has a first opening at a position at which the first opening overlaps with the photoelectric conversion element in plan view;
- a first inorganic insulating film that has a second opening inside the first opening and covers a surface of the first planarizing film;
- and
- a bias wire provided on the first inorganic insulating film and connected to the photoelectric conversion element via the second opening.
Dependencies are inferred from the claim text.