Active matrix substrate, x-ray imaging panel with the same, and method of manufacturing the same
AssigneeSharp Kabushiki Kaisha
InventorKATSUNORI MISAKI
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Abstract
An active matrix substrate includes a photoelectric conversion element, an electrode provided on at least one main surface of the photoelectric conversion element, and a first inorganic film covering a side surface of the photoelectric conversion element. The electrode includes an extending section covering the side surface of the photoelectric conversion element through intermediation of the first inorganic film.
Claims11
An active matrix substrate comprising:
- a photoelectric conversion element;
- an electrode provided on at least one main surface of the photoelectric conversion element;
- and
- a first inorganic film covering a side surface of the photoelectric conversion element,
- wherein the electrode includes an extending section covering the side surface of the photoelectric conversion element through intermediation of the first inorganic film.
A manufacturing method of an active matrix substrate, the manufacturing method comprising:
- forming a photoelectric conversion element on a substrate;
- forming a first inorganic film covering a side surface of the photoelectric conversion element;
- and
- forming an electrode on at least one main surface of the photoelectric conversion element,
- wherein the electrode includes an extending section covering the side surface of the photoelectric conversion element through intermediation of the first inorganic film.
A manufacturing method of an active matrix substrate, the manufacturing method comprising:
- forming a photoelectric conversion element on a substrate;
- forming a first inorganic film covering a side surface of the photoelectric conversion element;
- and
- forming an electrode on at least one main surface of the photoelectric conversion element, and forming a conductive film, the conductive film being formed of the same material as material of the electrode, being arranged away from the electrode, and covering the side surface of the photoelectric conversion element through intermediation of the first inorganic film.
Dependencies are inferred from the claim text.