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US 2020/0091196 A1Published application
Thin-film transistor substrate, method for manufacturing same, and liquid crystal display
AssigneeMitsubishi Electric Corporation
InventorsTsutomu MATSUURA, Kazunori INOUE
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Abstract
A TFT substrate is provided with a pixel TFT and a drive-circuit TFT disposed on a substrate. The pixel TFT includes a source electrode and a drain electrode that are disposed on the surface of the semiconductor layer and separated from each other. The drive-circuit TFT includes an etch stopper layer disposed on the semiconductor layer, and a source electrode and a drain electrode that are disposed on the surfaces of the etch stopper layer and the semiconductor layer and separated from each other.
Claims18
A thin-film transistor substrate comprising:
- a first thin-film transistor and a second thin-film transistor disposed on a substrate,
- wherein
- the first thin-film transistor includes
- a first gate electrode disposed on the substrate,
- a first gate insulating film covering the first gate electrode,
- a first oxide semiconductor layer facing the first gate electrode via the first gate insulating film,
- a first source electrode and a first drain electrode that are disposed on a surface of the first oxide semiconductor layer and separated from each other, and
- a first insulating film disposed on the first oxide semiconductor layer, the first source electrode, and the first drain electrode, and
- the second thin-film transistor includes
- a second gate electrode disposed on the substrate,
- a second gate insulating film covering the second gate electrode,
- a second oxide semiconductor layer facing the second gate electrode via the second gate insulating film,
- a second insulating film disposed on the second oxide semiconductor layer, and
- a second source electrode and a second drain electrode that are disposed on surfaces of the second insulating film and the second oxide semiconductor layer and separated from each other.
11 more elements
Dependencies are inferred from the claim text.