Flexible shield for semiconductor devices and methods
AssigneeIntel Corporation
InventorsBok Eng Cheah, Eng Huat Goh, Jackson Chung Peng Kong, Khang Choong Yong, Min Suet Lim
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Abstract
An electronic device and associated methods are disclosed. In one example, the electronic device includes a first device and a second device coupled to a surface of a substrate, and a continuous flexible shield woven over the first device and under the second device to separate the first device from the second device. In selected examples, the continuous flexible shield may be formed from a laminate and one or more of the devices may be coupled through an opening or via in the continuous flexible shield.
Claims21
An electronic device, comprising:
- a first device and a second device coupled to a surface of a substrate;
- a continuous flexible shield woven over the first device and under the second device to separate the first device from the second device;
- wherein the continuous flexible shield is electrically coupled to a around source in the substrate.
An electronic device, comprising:
- a first device and a second device coupled to a surface of a substrate;
- a continuous flexible shield woven over the first device and under the second device to separate the first device from the second device;
- wherein the continuous flexible shield is electrically coupled to a ground source in the substrate;
- and
- wherein the second device is coupled to the substrate through one or more vias passing through the continuous flexible shield.
A method of forming an electronic device, comprising:
- forming a continuous flexible shield, including:
- removing portions of a dielectric layer covering a metal layer in a dielectric-metal-dielectric laminate;
- forming one or more holes through the dielectric-metal-dielectric laminate;
- forming a first conductive via within a first hole, wherein the first conductive via is electrically isolated from the metal layer in the dielectric-metal-dielectric laminate;
- forming a second conductive via within a second hole, wherein the second conductive via is electrically coupled to the metal layer in the dielectric-metal-dielectric laminate;
- weaving the continuous flexible shield over a first electronic device and under a second electronic device, the first and second electronic devices coupled to a substrate;
- coupling the second conductive via to a ground in the substrate;
- and
- coupling the second electronic device to the substrate through the first conductive via.
Dependencies are inferred from the claim text.