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US 2020/0091073 A1Published application
Semicondcutor devices, semicondcutor packages and methods of forming the same
AssigneeTaiwan Semiconductor Manufacturing Company, Ltd.
InventorsSih-Hao Liao, Hung-Jui Kuo, Yu-Hsiang Hu, Meng-Che Tu
Life of this patent
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Abstract
Semiconductor devices, semiconductor packages and methods of forming the same are provided. One of the semiconductor device includes a dielectric layer and a connector. The dielectric layer includes a dielectric material and an additive, wherein the additive includes a compound represented by Chemical Formula 1. The connector is disposed in the dielectric layer.
Claims20
A semiconductor device, comprising:
- a dielectric layer, comprising a dielectric material and an additive, wherein the additive comprises a compound represented by the following Chemical Formula 1:
- in Chemical Formula 1,
- R is hydrogen, a hydroxyl group, a halogen group, a C1-C6 alkyl group, a carboxyl group, a vinyl group, an allyl group, a phenyl group, —OR′, —COR″, —CONR″, —COOR″, —CH2—CR″C═CR″2 or —SiR″3, wherein
- R′ is a C1-C6 alkyl group or a group represented by the following Chemical Formula 2 or the following Chemical Formula 3:
- in Chemical Formula 2,
- R2 and R3 are hydrogen, and R1 is hydrogen, a hydroxyl group, a halogen group, a C1-C6 alkyl group, a C1-C6 alkoxy group, a carboxyl group, a vinyl group, an allyl group, a phenyl group, —COR″, —CONR″, —COOR″, —CH2—CR″C═CR″2, —SiR″3,
- or
- R1 and R2 are hydrogen, and R3 is a hydroxyl group, a halogen group, a C1-C6 alkyl group, a C1-C6 alkoxy group, a carboxyl group, a vinyl group, an allyl group, a phenyl group, —COR″, —CONR″, —COOR″, —CH2—CR″C═CR″2 or —SiR″3;
- in Chemical Formula 3,
- one of R4 and R5 is hydrogen, and the other of R4 and R5 is hydrogen, a hydroxyl group, a halogen group, a C1-C6 alkyl group, a C1-C6 alkoxy group, a carboxyl group, a vinyl group, an allyl group, a phenyl group, —COR″, —CONR″, —COOR″, —CH2—CR″C═CR″2 or —SiR″3;
- and
- R″ is a halogen group, a C1-C6 alkyl group, a vinyl group, an allyl group or a phenyl group;
- and
- a connector, disposed in the dielectric layer.
11 more elements
A semiconductor package, comprising:
- a first die, comprising a connector thereon;
- a dielectric layer, over the first die and aside the connector, comprising a dielectric material and an additive, wherein the additive comprises a compound represented by the following Chemical Formula 1:
- in Chemical Formula 1,
- R is hydrogen, a hydroxyl group, a halogen group, a C1-C6 alkyl group, a carboxyl group, a vinyl group, an allyl group, a phenyl group, —OR′, —COR″, —CONR″, —COOR″, —CH2—CR″C═CR″2 or —SiR″3, wherein
- R′ is a C1-C6 alkyl group or a group represented by the following Chemical Formula 2 or the following Chemical Formula 3:
- in Chemical Formula 2,
- R2 and R3 are hydrogen, and R1 is hydrogen, a hydroxyl group, a halogen group, a C1-C6 alkyl group, a C1-C6 alkoxy group, a carboxyl group, a vinyl group, an allyl group, a phenyl group, —COR″, —CONR″, —COOR″, —CH2—CR″C═CR″2, —SiR″3,
- or
- R1 and R2 are hydrogen, and R3 is a hydroxyl group, a halogen group, a C1-C6 alkyl group, a C1-C6 alkoxy group, a carboxyl group, a vinyl group, an allyl group, a phenyl group, —COR″, —CONR″, —COOR″, —CH2—CR″C═CR″2 or —SiR″3;
- in Chemical Formula 3,
- one of R4 and R5 is hydrogen, and the other of R4 and R5 is hydrogen, a hydroxyl group, a halogen group, a C1-C6 alkyl group, a C1-C6 alkoxy group, a carboxyl group, a vinyl group, an allyl group, a phenyl group, —COR″, —CONR″, —COOR″, —CH2—CR″C═CR″2 or —SiR″3;
- and
- R″ is a halogen group, a C1-C6 alkyl group, a vinyl group, an allyl group or a phenyl group;
- and
- an encapsulant, encapsulating the first die and the dielectric layer;
- and
- a redistribution layer, over the dielectric layer and the connector and electrically connected to the first die through the connector.
14 more elements
A method of forming a semiconductor package, comprising:
- providing a first die having a connector thereon;
- forming a dielectric layer on the first die to cover the connector, wherein the dielectric layer comprises a dielectric material and an additive, and the additive comprises a compound represented by the following Chemical Formula 1:
- in Chemical Formula 1,
- R is hydrogen, a hydroxyl group, a halogen group, a C1-C6 alkyl group, a carboxyl group, a vinyl group, an allyl group, a phenyl group, —OR′, —COR″, —CONR″, —COOR″, —CH2—CR″C═CR″2 or —SiR″3, wherein
- R′ is a C1-C6 alkyl group or a group represented by the following Chemical Formula 2 or the following Chemical Formula 3:
- in Chemical Formula 2,
- R2 and R3 are hydrogen, and R1 is hydrogen, a hydroxyl group, a halogen group, a C1-C6 alkyl group, a C1-C6 alkoxy group, a carboxyl group, a vinyl group, an allyl group, a phenyl group, —COR″, —CONR″, —COOR″, —CH2—CR″C═CR″2, —SiR″3,
- or
- R1 and R2 are hydrogen, and R3 is a hydroxyl group, a halogen group, a C1-C6 alkyl group, a C1-C6 alkoxy group, a carboxyl group, a vinyl group, an allyl group, a phenyl group, —COR″, —CONR″, —COOR″, —CH2—CR″C═CR″2 or —SiR″3;
- in Chemical Formula 3,
- one of R4 and R5 is hydrogen, and the other of R4 and R5 is hydrogen, a hydroxyl group, a halogen group, a C1-C6 alkyl group, a C1-C6 alkoxy group, a carboxyl group, a vinyl group, an allyl group, a phenyl group, —COR″, —CONR″, —COOR″, —CH2—CR″C═CR″2 or —SiR″3;
- and
- R″ is a halogen group, a C1-C6 alkyl group, a vinyl group, an allyl group or a phenyl group;
- bonding the first die onto a first redistribution layer over a carrier;
- forming an encapsulant over the first redistribution layer to encapsulate the first die and the dielectric layer;
- removing a portion of the encapsulant to expose the connector;
- forming a second redistribution layer over the first die to electrically connect to the connector;
- forming a terminal connector over the second redistribution layer;
- and
- removing the carrier.
17 more elements
Dependencies are inferred from the claim text.