Energy storing interposer device and manufacturing method

An interposer device for electrically and mechanically interconnecting a first electrical circuit element and a second electrical circuit element, said interposer device having a first side to be electrically and mechanically connected to said first electrical circuit element, and a second side, opposite the first side, to be electrically and mechanically connected to said second electrical circuit element, wherein said interposer device comprises:

• a first conductor pattern on the first side of said energy storage device, said first conductor pattern defining a portion of said interposer device to be covered by said first electrical circuit element when said first electrical circuit element is electrically and mechanically connected to said first conductor pattern;
• a second conductor pattern on the second side of said energy storage device to be electrically and mechanically connected to said second electrical circuit element, said second conductor pattern being electrically coupled to said first conductor pattern;
• and
• a plurality of nanostructure energy storage devices arranged within the portion of said interposer device to be covered by said first electrical circuit element, each of said nanostructure energy storage devices comprising:
• at least a first plurality of conductive nanostructures;
• a conduction controlling material embedding each nanostructure in said first plurality of conductive nanostructures;
• a first electrode connected to each nanostructure in said first plurality of nano structures;
• and
• a second electrode separated from each nanostructure in said first plurality of nanostructures by said conduction controlling material,
• wherein at least one of said first electrode and said second electrode is connected to said first conductor pattern to allow electrical connection of said nanostructure energy storage device to said first electrical circuit element.

A method of manufacturing an interposer device for electrically and mechanically interconnecting a first electrical circuit element and a second electrical circuit element, said method comprising the steps of:

• providing a substrate;
• forming a first device layer on said substrate, said first device layer comprising an insulating portion and a conducting portion defining a first conductor pattern for electrical connection to said first electrical circuit element, and a first electrode;
• forming at least a first plurality of conductive nanostructures on said first electrode, in such a way that each nanostructure in said first plurality of nanostructures is electrically connected to said first electrode;
• embedding each nanostructure in said first plurality of conductive nanostructures in a conduction controlling material, thereby forming a nanostructure energy storage device layer on said first device layer;
• providing a second electrode in such a way that said second electrode is separated from each nanostructure in said first plurality of nanostructures by said conduction controlling material;
• forming a second device layer on said nanostructure energy storage device layer, said second device layer comprising an insulating portion and a conducting portion defining a second conductor pattern for electrical connection to said second electrical circuit element;
• forming conductive structures through said nanostructure energy storage device layer for interconnecting said first conductor pattern and said second conductor pattern;
• and
• removing said substrate.