Detecting defects in a logic region on a wafer

A non-transitory computer-readable medium, storing program instructions executable on a computer system for performing a computer-implemented method for detecting defects in a logic region on a wafer, wherein the computer-implemented method comprises:

• acquiring information for design-based care areas in a logic region of a wafer, wherein the design-based care areas comprise different types of design-based care areas and each of the design-based care areas is a discrete area within the logic region corresponding to a contiguous set of pixels in output generated for the wafer by an inspection subsystem configured to scan the wafer to thereby generate the output;
• designating the different types of the design-based care areas as different types of sub-regions;
• for a localized area within the logic region, assigning two or more instances of the sub-regions located in the localized area to a super-region;
• generating one scatter plot for all of the two or more instances of the sub-regions assigned to the super-region, wherein the one scatter plot is generated with different segmentation values determined for the output corresponding to the different types of the sub-regions;
• and
• detecting defects in the sub-regions based on the one scatter plot.

A computer-implemented method for detecting defects in a logic region on a wafer, comprising:

• acquiring information for design-based care areas in a logic region of a wafer, wherein the design-based care areas comprise different types of design-based care areas and each of the design-based care areas is a discrete area within the logic region corresponding to a contiguous set of pixels in output generated for the wafer by an inspection subsystem configured to scan the wafer to thereby generate the output;
• designating the different types of the design-based care areas as different types of sub-regions;
• for a localized area within the logic region, assigning two or more instances of the sub-regions located in the localized area to a super-region;
• generating one scatter plot for all of the two or more instances of the sub-regions assigned to the super-region, wherein the one scatter plot is generated with different segmentation values determined for the output corresponding to the different types of the sub-regions;
• and
• detecting defects in the sub-regions based on the one scatter plot.