Primary Beam Scanning Apparatus and Signal Processing Method
AssigneeJEOL Ltd.
InventorTakanori Matsubara
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Abstract
There is provided a primary beam scanning apparatus capable of producing data having a bit depth higher than the resolution of an analog-to-digital converter. The primary beam scanning apparatus is capable of controlling a scan rate of a primary beam for scanning a specimen. The scanning apparatus includes a detector for detecting signals generated in response to irradiation of the specimen with the primary beam and providing an analog output signal, an analog-to-digital converter for sampling the analog signal and converting it into a digital signal, and an arithmetic section for averaging the digital signal.
Claims7
A primary beam scanning apparatus configured to control a scan rate of a primary beam for scanning a specimen, the primary beam scanning apparatus comprising:
- a detector for detecting signals generated in response to irradiation of the specimen with the primary beam and providing an analog output signal;
- an analog-to-digital converter for sampling the analog signal and converting the analog output signal into a digital signal;
- and
- an arithmetic section for averaging the digital signal.
A signal processing method for use in a primary beam scanning apparatus configured to control a scan rate of a primary beam for scanning a specimen, the method comprising:
- irradiating the specimen with the primary beam to induce signals;
- detecting the induced signals by a detector that provides an analog output signal;
- sampling the analog output signal from the detector and converting the analog output signal into a digital signal by an analog-to-digital converter;
- and
- averaging the digital signal.
Dependencies are inferred from the claim text.