US 2020/0090901 A1 · REAL-TIME DIRECT MEASUREMENT OF MECHANICAL PROPERTIES IN-SITU OF SCANNING BEAM MICROSCOPE

Abstract

System and methods are described for directly measuring mechanical properties of a sample while concurrently imaging the sample using a scanning beam microscope (e.g., a scanning electron microscope (SEM)). The system includes a clamping mount configured to hold the sample and a load cell positioned proximal to the clamping mount and configured to provide a direct, real-time measurement of force on the sample end. The system further includes a controllable probe configured to apply a force to the sample. In some embodiments, the sample load cell is tiltably couplable to a sample held by the clamping mount and the controllable probe is moveable between a plurality of different mounting positions relative to the load cell.

Claims19

Dependent claims

A method for direct-measurement of mechanical properties of a sample during electronic imaging, the method comprising:

coupling a load cell to a sample under test, where the load cell is configured to directly measure a magnitude of force applied to the sample under test;
capturing electronic image data of the sample under test;
and
operating an actuator to apply a force to the sample under test while capturing the electronic image data.

1 more element

A system for direct-measurement of mechanical properties of a sample during electronic imaging, the system comprising:

a load cell selectively couplable to a sample under test, where the load cell is configured to directly measure a magnitude of force applied to the sample under test;
an actuator configured to apply a force to the sample under test while electronic image data of the sample under test is captured;
and
an electronic controller configured to
receive the electronic image data from an imaging system, wherein the electronic image data includes the sample under test and is captured by the imaging system while the force is applied to the sample under test by the actuator, and
correlate data indicative of the magnitude of force applied to the sample under test with the electronic image data.

3 more elements

Dependencies are inferred from the claim text.

Facts

Application

16/569,384Filed 12 Sep 2019

Priority

14 Sep 2018

Published

19 Mar 2020

Term ends

Not estimatedThe source records don’t support an estimate.

Classification10 codes

H01J 37/20
Details: means for supporting or positioning the object or the material; Means for adjusting diaphragms or lenses associated with the support
H01J 37/256
Tubes for spot-analysing by electron or ion beams; Microanalysers: using scanning beams
G01N 3/068
Special adaptations of indicating or recording means: with optical indicating or recording means
G01N 3/08
Investigating strength properties of solid materials by application of mechanical stress: by applying steady tensile or compressive forces

Real-time direct measurement of mechanical properties in-situ of scanning beam microscope

Life of this patent

Real-time direct measurement of mechanical properties in-situ of scanning beam microscope

Life of this patent

Abstract

Claims19