Cassette supply system to store and handle cassettes and processing apparatus equipped therewith
AssigneeASM IP Holding B.V.
InventorChris de Ridder
Life of this patent
Estimating the term…
Abstract
The invention relates to a cassette supply system to store and handle cassettes for substrates and a processing apparatus for processing substrates equipped with said system. The system having a cassette storage provided with base plate constructed and arranged to support cassettes. Also a cassette handler with an end effector with at least one protrusion to support and position the cassette on the end effector is provided to transfer cassettes to and from the base plate. The base plate may be provided with a substantially flat surface to support the cassettes.
Claims20
A cassette supply system to store and handle cassettes for substrates, said system comprising:
- a cassette storage provided with a base plate constructed and arranged to support cassettes;
- and
- a cassette handler to transfer cassettes to and from the base plate and provided with an end effector provided with at least one protrusion to support and position the cassette on the end effector wherein the base plate is provided with a substantially flat surface to support and position the cassettes.
Dependencies are inferred from the claim text.