Raman spectrum inspection apparatus and method of monitoring detection security of the same

Abstract

There are provided a Raman spectrum inspection apparatus (100a) and a method of monitoring detection security of the same. The Raman spectrum inspection apparatus (100a) includes: an optical device (20) configured to guide exciting light (11) to a sample (30) and collect a light signal from the sample (30); a spectrometer (40) configured to split the light signal collected by the optical device (20) so as to generate a Raman spectrum of the sample (30) which is detected; and a security monitor configured to monitor a security state of the sample (30) during irradiating of the exciting light (11) from the laser (10) onto the sample (30), and to provide a security indicating signal representing whether or not the sample (30) is damaged due to being irradiated by the exciting light (11).

Dependencies are inferred from the claim text.