High temperature carbonization furnace

Abstract

A high temperature carbonization furnace has a cavity, at least two microwave units and a control unit. Each microwave unit is disposed along a processing path of the cavity. The control circuit receives signals of temperature sensors distributed on the processing path of the cavity. The control unit generates controls signals to control magnetrons of the different microwave units to be turned on/off, or to control powers of the magnetrons of the different microwave units, such that a location of the processing path, on which the microwave unit disposed, can attain an expected temperature condition. Further, the temperatures in the cavity can be adjusted precisely, such that the temperature distribution in the cavity is uniform, the uniformity for heating the processing object can be increased, and the temperature gradient of different temperature control regions can be controlled and adjusted, so as to achieve the advantage of adjusting and controlling the temperature condition of the processing path according to the requirement of the processing object.

Dependencies are inferred from the claim text.