Disturbance non-interference-enabling compensation system for positioning control device, and component mounting apparatus

A disturbance non-interference-enabling compensation system of a positioning control device for controlling the position of moving bodies by a two-degree-of-freedom control system in a moving body drive system in which multiple moving bodies individually accelerated and decelerated by multiple drive sources are mounted on a single machine base or multiple connected machine bases, and disturbances generated by acceleration and deceleration driving of any of the moving bodies are transmitted to an adjacent another of the moving bodies via the machine base, the system comprising:

• a two-degree-of-freedom control system, the two-degree-of-freedom control system including:
• a detecting section configured to detect the position of the moving body;
• a feedback compensator configured to output a feedback operation amount such that a deviation between a position command value of the moving body and a detection value of the detecting section is input, the feedback operation amount being output such that the deviation is small;
• a feedforward compensator configured to output a feedforward operation amount using the position command value of the moving body as an input;
• an adder configured to output the operation amount of the moving body by adding the feedback operation amount and the feedforward operation amount;
• and
• a disturbance non-interference-enabling compensator configured to perform non-interference-enabling compensation of the disturbance with respect to the operation amount and the input of the feedback compensator of the moving body on a disturbance-receiving side, wherein
• the disturbance non-interference-enabling compensator includes:
• a second-order differentiator configured to perform second-order differentiation of the position command value of the moving body on a disturbance-generating side and output an acceleration command value,
• a first multiplier configured to multiply the acceleration command value that is an output of the second-order differentiator by a first gain and output a correction amount with respect to the input of the feedback compensator on the moving body on the disturbance-receiving side, and
• a second multiplier configured to multiply the acceleration command value that is the output of the second-order differentiator by a second gain and output a correction amount with respect to the operation amount of the moving body on the disturbance-receiving side, and
• the disturbance non-interference-enabling compensation system of the positioning control device performs the disturbance non-interference-enabling compensation by correcting the operation amount and the input of the feedback compensator of the moving body on the disturbance-receiving side using the output of the first multiplier and the output of the second multiplier.

A disturbance non-interference-enabling compensation system of a positioning control device for controlling the position of moving bodies by a feedback control system for each of the moving bodies in a moving body drive system in which multiple moving bodies individually accelerated and decelerated by multiple drive sources are mounted on a single machine base or multiple connected machine bases, and disturbances generated by acceleration and deceleration driving of any of the moving bodies are transmitted to an adjacent another of the moving bodies via the machine base, the system comprising:

• a feedback control system, the feedback control system including:
• a detecting section configured to detect the position of the moving body;
• a feedback compensator configured to output an operation amount of the moving body such that a deviation between a position command value of the moving body and a detection value of the detecting section is input, the operation amount of the moving body being output such that the deviation is small;
• and
• a disturbance non-interference-enabling compensator configured to perform non-interference-enabling compensation of the disturbance with respect to an operation amount and the input of the feedback compensator of the moving body on a disturbance-receiving side, wherein
• the disturbance non-interference-enabling compensator includes:
• a second-order differentiator configured to perform second-order differentiation of the position command value of the moving body on a disturbance-generating side and output an acceleration command value,
• a first multiplier configured to multiply the acceleration command value that is an output of the second-order differentiator by a first gain and output a correction amount with respect to the input of the feedback compensator on the moving body on the disturbance-receiving side, and
• a second multiplier configured to multiply the acceleration command value that is the output of the second-order differentiator by a second gain and output a correction amount with respect to the operation amount of the moving body on the disturbance-receiving side, and
• the disturbance non-interference-enabling compensation system of the positioning control device performs the disturbance non-interference-enabling compensation by correcting the operation amount and the input of the feedback compensator of the moving body on the disturbance-receiving side using the output of the first multiplier and the output of the second multiplier.