Rotary vane vacuum pump

Abstract

The invention relates to a rotary vane vacuum pump comprising a housing member whose inner wall defines at least one pumping space, and a rotor that is arranged for rotation in the pumping space and has a rotor member and at least one vane, wherein the vane projects radially beyond the rotor member and together with the inner wall of the housing body a pumping volume that can be pumped by rotation of the rotor from an inlet to an outlet of the rotary vane vacuum pump, wherein the vane, at least in a region cooperating with the inner wall, comprises a polytetrafluoroethylene material containing polyimide particles and manufactured by hot pressing and sintering, and wherein the inner wall has a slide layer at least in a region cooperating with the vane, said slide layer comprising an oxide layer formed by anodic oxidation in an electrolyte including oxalic acid.

Dependencies are inferred from the claim text.