Gas sensor array with built-in humidity sensor
AssigneeAernos, Inc.
InventorsSundip R. DOSHI, Heng Chia SU
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Abstract
A process for making highly sensitive nano-nucleated structures for use in room temperature nanohybrid gas sensors which utilize high surface area nanomaterials (carbon nanotubes, dichalcogenides, graphene, metal-organic frameworks, metal oxides, etc.) functionalized with atomically dispersed metal catalysts for sensing airborne environmental pollutants, and co-located with humidity sensing material for higher gas concentration measurement accuracy.
Claims5
A sensor array comprising a plurality of sensing elements, wherein each of the plurality of sensing elements are functionalized with a deposited mixture consisting of hybrid nanostructures and a molecular formulation specifically targeting at least one of a plurality of gases, and wherein each of the plurality of sensing elements comprises a resistance and a capacitance, and wherein at least one resistance and capacitance are altered when the interacting with gaseous chemical compounds;
- wherein the deposited mixture comprises highly sensitive nano-nucleated structures of high surface area nanomaterials that are functionalized with atomically dispersed metal catalysts, and wherein the nano-nucleated structures respond in real-time with a large resistance change when a change in relative humidity (RH) occurs.
Dependencies are inferred from the claim text.