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US 2020/0062586 A1Published application
Semiconductor device and method of producing a semiconductor device
AssigneeFraunhofer-Gesellschaft zur Foerderung der angewandten Forschung e.V.
InventorsSabine TRUPP, Michael HENFLING, Karl NEUMEIER
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Abstract
A method of producing a semiconductor device includes providing a carrier structure having a semiconductor substrate; applying or introducing a precursor substance onto or into the carrier structure, treating the precursor substance for producing a porous matrix structure; introducing a functionalization substance into the porous matrix structure.
Claims20
A semiconductor device comprising:
- a semiconductor substrate;
- wherein the semiconductor substrate comprises a plurality of integrated circuit configurations;
- wherein the integrated circuit configurations comprise a layer which includes a porous matrix structure,
- wherein a functionalization substance is introduced into the porous matrix structure.
1 more element
Dependencies are inferred from the claim text.