Fan scrubber and controlling method of fan scrubber
AssigneeToshiba Memory Corporation
InventorYuki TSUJIGUCHI
Life of this patent
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Abstract
According to one embodiment, a fan scrubber includes an inlet pipe to be connected to a post-stage side of a vacuum pump, in a state where a film preparation apparatus is arranged at a pre-stage before the vacuum pump, a process chamber connected to the inlet pipe, and containing a fan connected to a main shaft of a motor, a heater configured to heat the inlet pipe, and a controller configured to control turning on/off of the heater. The controller turns off the heater, when a signal received from the film preparation apparatus has been switched from a film preparation signal to a cleaning signal.
Claims20
A fan scrubber comprising:
- an inlet pipe to be connected to a post-stage side of a vacuum pump, in a state where a film preparation apparatus is arranged at a pre-stage before the vacuum pump;
- a process chamber connected to the inlet pipe, and containing a fan connected to a main shaft of a motor;
- a heater configured to heat the inlet pipe;
- and
- a controller configured to control turning on/off of the heater,
- wherein the controller turns off the heater, when a signal received from the film preparation apparatus has been switched from a film preparation signal to a cleaning signal.
A controlling method of a fan scrubber that includes an inlet pipe, a process chamber connected to the inlet pipe, and a heater configured to heat the inlet pipe, and is configured to process gas exhausted from a film preparation apparatus through a vacuum pump, by using a fan contained in the process chamber, the method comprising:
- receiving a signal from the film preparation apparatus;
- and
- turning off the heater, when the signal received from the film preparation apparatus has been switched from a film preparation signal to a cleaning signal.
Dependencies are inferred from the claim text.