Bulk-acoustic wave resonator
AssigneeSamsung Electro-Mechanics Co., Ltd.
InventorsDae Hun JEONG, Sung Wook KIM, Sang Uk SON, Sang Heon HAN, Won HAN
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Abstract
A bulk-acoustic wave resonator includes: a substrate; a membrane layer forming a cavity with the substrate; a lower electrode disposed on the membrane layer; an insertion layer disposed to cover at least a portion of the lower electrode; a piezoelectric layer disposed on the lower electrode to cover the insertion layer; and an upper electrode at least partially disposed on the piezoelectric layer, wherein the upper electrode includes a reflection groove disposed on the insertion layer.
Claims14
A bulk-acoustic wave resonator, comprising:
- a substrate;
- a membrane layer forming a cavity with the substrate;
- a lower electrode disposed on the membrane layer;
- an insertion layer disposed to cover at least a portion of the lower electrode;
- a piezoelectric layer disposed on the lower electrode to cover the insertion layer;
- and
- an upper electrode at least partially disposed on the piezoelectric layer,
- wherein the upper electrode comprises a reflection groove disposed on the insertion layer.
A bulk-acoustic wave resonator, comprising:
- a substrate;
- a lower electrode disposed on the substrate;
- a piezoelectric layer comprising a piezoelectric portion disposed to cover the lower electrode, and a bent portion having an inclined surface, and having a thickness greater than a thickness of the piezoelectric portion;
- an upper electrode, at least a portion of the upper electrode being disposed in a position higher than a position of the piezoelectric layer;
- and
- a reflection groove disposed on the upper electrode, and disposed in a position higher than a position of the bent portion.
Dependencies are inferred from the claim text.