Transport system, mover, control apparatus, and control method
AssigneeCanon Kabushiki Kaisha
InventorTakeshi Yamamoto
Life of this patent
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Abstract
A transport system includes: a mover having a first magnet group arranged in parallel to a first direction and a second magnet group arranged in parallel to a second direction crossing the first direction; and a plurality of coils arranged in parallel to the first direction so as to be able to face the first magnet group and the second magnet group, and the mover is able to move in the first direction along the plurality of coils by electromagnetic force received by the first magnetic group from the plurality of coils while an attitude of the mover is controlled by electromagnetic force received by the first magnetic group or the second magnetic group from the plurality of coils.
Claims14
A transport system comprising:
- a mover having a first magnet group arranged in parallel to a first direction and a second magnet group arranged in parallel to a second direction crossing the first direction;
- and
- a plurality of coils arranged in parallel to the first direction so as to be able to face the first magnet group and the second magnet group,
- wherein the mover is able to move in the first direction along the plurality of coils by electromagnetic force received by the first magnetic group from the plurality of coils while an attitude of the mover is controlled by electromagnetic force received by the first magnetic group or the second magnetic group from the plurality of coils.
A mover comprising:
- a first magnet group arranged in parallel to a first direction;
- and
- a second magnet group arranged in parallel to a direction crossing the first direction,
- wherein the mover is able to move in the first direction along a plurality of coils by electromagnetic force received by the first magnetic group from the plurality of coils while an attitude of the mover is controlled by electromagnetic force received by the first magnetic group or the second magnetic group from the plurality of coils, the plurality of coils being arranged in parallel to the first direction so as to be able to face the first magnet group and the second magnet group.
A control apparatus that controls a mover having a first magnet group arranged in parallel to a first direction and a second magnet group arranged in parallel to a direction crossing the first direction, wherein the mover is able to move in the first direction along a plurality of coils by electromagnetic force received by the first magnetic group from the plurality of coils while an attitude of the mover is controlled by electromagnetic force received by the first magnetic group or the second magnetic group from the plurality of coils, the plurality of coils being arranged in parallel to the first direction so as to be able to face the first magnet group and the second magnet group,
- the control apparatus comprising:
- a transport control unit that controls transportation of the mover in the first direction by controlling electromagnetic force received by the first magnet group from the plurality of coils;
- and
- an attitude control unit that controls an attitude of the mover by controlling electromagnetic force received by the first magnetic group or the second magnetic group from the plurality of coils.
A control method that controls a mover having a first magnet group arranged in parallel to a first direction and a second magnet group arranged in parallel to a direction crossing the first direction, wherein the mover is able to move in the first direction along a plurality of coils by electromagnetic force received by the first magnetic group from the plurality of coils while an attitude of the mover is controlled by electromagnetic force received by the first magnetic group or the second magnetic group from the plurality of coils, the plurality of coils being arranged in parallel to the first direction so as to be able to face the first magnet group and the second magnet group,
- the control method comprising:
- controlling transportation of the mover in the first direction by controlling electromagnetic force received by the first magnet group from the plurality of coils;
- and
- controlling an attitude of the mover by controlling electromagnetic force received by the first magnetic group or the second magnetic group from the plurality of coils.
Dependencies are inferred from the claim text.