US 2020/0052359 A1 · METAMATERIAL WAVEGUIDES AND SHIELDED BRIDGES FOR QUANTUM CIRCUITS

Abstract

Metamaterial waveguides and shielded bridges are employed to improve the scalability and routing of quantum computing circuits. A metamaterial waveguide includes a signal conductor that has a periodic array of lumped element resonators distributed along and electrically coupled to a signal conductor. The periodic array of lumped element resonator pairs defines a bandgap within an operating bandwidth of the waveguide. Qubits can communicate within the operating bandwidth of the waveguide and communications via the waveguide can be controlled by changing a center frequency of the qubits. A shielded bridge is used to cross over high frequency communications and control CPW's in a quantum computing circuit. The shielded bridge includes a signal bridge that is elevated and extends over a separate CPW, and a ground bridge positioned between the signal bridge and the separate CPW.

Claims20

Dependent claims

A waveguide for communicatively coupling qubits, the waveguide comprising:

a longitudinal signal conductor extending across a surface of a dielectric substrate;
a periodic array of lumped element resonators distributed along and electrically coupled to the signal conductor, wherein the resonators create a bandgap within an operating bandwidth of the waveguide;
and
wherein all wavelengths within the bandgap are larger than geometrical extents of each of the resonators.

1 more element

A method of forming a shielded bridge for a coplanar waveguide (CPW), the method comprising:

depositing one or more first electron beam (e-beam) resist layers on a dielectric substrate;
performing 3-D grayscale lithography on the one or more first e-beam resist layers to create removable portions and a tenacious portion of the one or more first e-beam resist layers;
removing the removable portions of the one or more first e-beam resist layers such that the tenacious portion of the one or more first e-beam resist layers remains and extends between a first termination region and a second termination region;
depositing a first layer of metal to form a ground bridge that extends from the first termination region, across the tenacious portion of the one or more first e-beam resist layers, to the second termination region, such that the ground bridge is electrically coupled to the first and second termination regions;
depositing one or more second e-beam resist layers on the dielectric substrate;
performing 3-D grayscale lithography on the one or more second e-beam resist layers to create removable regions and a tenacious region of the one or more second e-beam resist layers;
removing the removable regions of the one or more second e-beam resist layers such that the tenacious region of the one or more second e-beam resist layers remains and extends between a first terminal and a second terminal of the CPW;
depositing a second layer of metal to form a signal bridge that extends from the first terminal of the CPW, across the tenacious region of the one or more second e-beam resist layers to the second terminal of the CPW such that the signal bridge is electrically coupled to the first and second terminals of the CPW;
and
removing all remaining portions of the one or more second e-beam resist layers.

7 more elements

Dependencies are inferred from the claim text.

Facts

Application

16/293,416Filed 5 Mar 2019

Priority

5 Mar 2018

Published

13 Feb 2020

Term ends

Not estimatedThe source records don’t support an estimate.

Classification6 codes

H01P 1/2005
Frequency-selective devices, e.g. filters: electromagnetic photonic bandgaps [EPB], or photonic bandgaps [PBG]
H01P 3/00
Waveguides
H01P 1/20381
Non-comb or non-interdigital filters: special shape resonators
G02F 2202/30
Materials and properties: metamaterials

Metamaterial waveguides and shielded bridges for quantum circuits

Life of this patent

Metamaterial waveguides and shielded bridges for quantum circuits

Life of this patent

Abstract

Claims20